November 17, 2023
Meet the new Canon semiconductor machine called the FPA-1200NZ2C.
This new Canon machine is capable of making semiconductors that are equivalent to a 5-nanometer process and can go as small as 2 nanometers.
This machine operates differently than the market leader ultraviolet (EUV) lithography made by ASML.
Instead of using optical light to transfer a circuit pattern, fine circuit patterns on the mask can be precisely reproduce on the wafer.” Thus, complex two- or three-dimensional circuit patterns can be formed in a single imprint, which may reduce the cost of ownership (CoO),” Canon says
This nanoimprint lithography technology has been in use since 2004 and is in competition to the best use ASML
